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MSE 404 TM2 - Thin Film Mechanical Proprties

Last offered Fall 2023

Official Description

Experiments include direct hands-on investigations or are performed through computational approaches. Laboratory experiences include both fundamental studies as well as investigations on more applied topics. Course Information: 1.5 undergraduate hours. 1.5 graduate hours. May be repeated if topics vary. Prerequisite: MSE 307 and MSE 308 or permission of instructor. Senior standing.

Section Description

Introduces seniors and graduate students to the fabrication, analysis, and mechanical properties of thin film materials through hands-on experiments. Covers both the principles and practice of (a) deposition of thin film materials by vacuum evaporation, sputtering, and plasma assisted processes; (b) modification of mechanical properties by thermal reaction, surface treatment, etc.; (c) measurement of key properties including film thickness, microstructure, optical indexes, and internal stress. Methods to optimize the film microstructure and engineering properties via growth techniques are emphasized.

Related Faculty

Thin Film Mechanical ProprtiesTM266892B11.51400 - 1650 T R  113 Ceramics Building Jian-Min Zuo
Jie Zhao
Kaijun Yin