MSE 404 TM2 - Thin Film Mechanical Proprties
Last offered Fall 2023
Experiments include direct hands-on investigations or are performed through computational approaches. Laboratory experiences include both fundamental studies as well as investigations on more applied topics. Course Information: 1.5 undergraduate hours. 1.5 graduate hours. May be repeated if topics vary. Prerequisite: MSE 307 and MSE 308 or permission of instructor. Senior standing.
Introduces seniors and graduate students to the fabrication, analysis, and mechanical properties of thin film materials through hands-on experiments. Covers both the principles and practice of (a) deposition of thin film materials by vacuum evaporation, sputtering, and plasma assisted processes; (b) modification of mechanical properties by thermal reaction, surface treatment, etc.; (c) measurement of key properties including film thickness, microstructure, optical indexes, and internal stress. Methods to optimize the film microstructure and engineering properties via growth techniques are emphasized.