ME 598 JWM - MicroNano Fabrication Capstone
Last offered Spring 2024
Subject offerings of new and developing areas of knowledge in mechanical engineering intended to augment the existing curriculum. See Class Schedule or departmental course information for topics and prerequisites. Course Information: May be repeated in the same or separate terms if topics vary.
This course is a hands-on micro-nano fabrication course. The student will be assigned a process topic including but not limited to spinning, exposure, PVD, RIE or ICP DRIE etching. Through in-lab training, the student will fabricate patterned test samples with micron scale resolution, then run a parameter study on the process. The student will then characterize the samples (SEM, profilometery, etc), analyze the results, and present the results for review. A report of the work accomplished, process used, and results will be provided for review. Students enrolled in this course will have a unique opportunity to fabricate and characterize micro-nano samples using modern techniques and equipment. Suggested related coursework includes ME487, ECE444. No required pre-requisites.
|MicroNano Fabrication Capstone
| Joe Maduzia