Course Websites

ME 598 JWM - MicroNano Fabrication Capstone

Last offered Fall 2024

Official Description

Subject offerings of new and developing areas of knowledge in mechanical engineering intended to augment the existing curriculum. See Class Schedule or departmental course information for topics and prerequisites. Course Information: May be repeated in the same or separate terms if topics vary.

Section Description

This course is a hands-on micro-nano fabrication course. The student will be assigned a process topic including but not limited to spinning, exposure, PVD, RIE or ICP DRIE etching. Through in-lab training, the student will fabricate patterned test samples with micron scale resolution, then run a parameter study on the process. The student will then characterize the samples (SEM, profilometery, etc), analyze the results, and present the results for review. A report of the work accomplished, process used, and results will be provided for review. Students enrolled in this course will have a unique opportunity to fabricate and characterize micro-nano samples using modern techniques and equipment. Pre-requisites: ME487 OR ME 586 OR ME 588 OR ECE444.
MicroNano Fabrication CapstoneJWM32262LCD4 -     Joe Maduzia