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ME 487 - MEMS-NEMS Theory & Fabrication

Spring 2021

Official Description

Physical and chemical theory, design, and hands-on fabrication of micro- and nano-electromechanical systems (MEMS and NEMS); cleanroom fabrication theory, including general cleanroom safety, lithography, additive and subtractive processes, bulk and surface micromachining, deep reactive ion etching (DRIE), lithographic Galvanoformung Abformung (LIGA), packaging, scaling, actuators, and micro-nanofluids; fabrication of two take-home devices, such as piezoresistive sensors and microfluidic logic chips, that demonstrate advanced fabrication processing. Course Information: 4 undergraduate hours. 4 graduate hours. Prerequisite: PHYS 212.

Related Faculty

Detailed Course Description

Physical and chemical theory, design and hands-on fabrication of micro-and nano-electromechanical systems (MEMS and NEMS); cleanroom fabrication theory, including general cleanroom safety, lithography, additive and subtractive processes, bulk and surface micromachining, deep reactive ion etching (DRIE), lithographic Galvanoformung Abformung (LIGA), packaging, scaling, actuators, and micro-nanofluids; fabrication of two take-home devices, such as piezoresistive sensors and microfluidic logic chips, that demonstrate advanced fabrication processing.

Prerequisite - Physics 212 4 Undergraduate hours or 4 Graduate Hours

TOPICS:

1. Safety

2. Lithography

3. Additive processes

4. Subtractive processes

5. Bulk micromachining

6. Surface micromachining

7. DRIE and LIGA

8. Packaging

9. Scaling

10. Actuators

11. Microfluidics

12. In-class exams

LABORATORY TOPICS

1. Photolithography

2. Metal deposition

3. Dry and wet etching

4. Pressure Sensors

5. Microfluidics

6. Device testing

7. Project reports

ME: MechSE or technical elective.

EM: Possible secondary field, with approval.

TitleSectionCRNTypeHoursTimesDaysLocationInstructor
MEMS-NEMS Theory & FabricationABA52253LAB00800 - 1050 F  213A Mechanical Engineering Bldg 
MEMS-NEMS Theory & FabricationABB52254LAB01400 - 1650 F  213A Mechanical Engineering Bldg 
MEMS-NEMS Theory & FabricationABC52255LAB01500 - 1750 R  213A Mechanical Engineering Bldg 
MEMS-NEMS Theory & FabricationOLG62687OLC40930 - 1050 T R    Gaurav Bahl
MEMS-NEMS Theory & FabricationOLU52252OLC40930 - 1050 T R    Gaurav Bahl